Oxalyl fluoride is the organofluorine compound with the formula (COF)2. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.
Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
See also Oxalyl chloride Oxalyl bromide Dioxane tetraketone Oxalyl
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