Hexachlorodisiloxane is a chemical compound composed of chlorine, silicon, and oxygen. Structurally, it is the symmetrical ether of two trichlorosilyl groups, and can be synthesized via high-temperature oxidation of silicon tetrachloride:2SiCl4 + O2 ->[950-970^\circ\text{C}] 2(SiCl3)2O + Cl2
At room temperature, it is a colorless liquid that hydrolyzes upon exposure to water to give silicon dioxide and hydrochloric acid: (SiCl3)2O + 3H2O -> 2SiO2 + 6HCl Intense heat evinces a similar decomposition: 2(SiCl3)2O ->[\Delta] SiO2{} + 3SiCl4
Reaction with antimony trifluoride gives the analogous hexafluorodisiloxane.
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